Ion Implant Applications

Toyo Tanso produces a full range of replacement parts for Axcelis (Eaton), Varian and Applied Material Tools.  As the world’s largest manufacturer of Carbon and Isostactically molded graphite products, we have developed a line a consumable parts that are cost effective compared to original equipment.  These parts are engineered and manufactured in a state-off the art production facility using our own premium graphite that is produced in the USA. We then perform an Ultra high purification process and apply a variety of coatings as required in your process. Finally the parts are inspected and packaged in a clean room environment.

 Currently we can offer the following special coatings.

Amphorous Carbon (A/C) / Vitreous Carbon Silicon Carbide           [Ion Implant Search]

We continue to expand our line of replacement parts but if you do not find the part you require, please contact us as our list is change continually.

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