A dense layer of silicon carbide (SiC) is created via chemical vapor deposition (CVD).

• Protects substrate from ambient environment
• Controls generation of particles and gas from substrate
• Allows modification, etc. of substrate surface
• Maximum dimensions:Φ1050X830H

Article	Conditions for SiC Coating
Max size (mm)	Φ1050x830H
Thickness of SiC layer(μm)	120±30
Metal impurities content(mass ppm) ※by GDMS method	B:0.15 / Na:0.02Al:0.01 / Cr: <0.1Fe:0.02 / <0.01

※Please consult on deciding the thickness of SiC layer.

SiC coated graphite PERMA-KOTE™

Pyrolytic carbon is coated via chemical vapor deposition (CVD).

• Improves gas impermeability
• Controls generation of particles and gas from substrate
• Improves chemical resistance

Pyrolytic graphite coating PYROGRAPH™

Glasslike carbon impregnates or covers the substrate.

• ・Improves gas impermeability
• ・Controls generation of particles from substrate

Glass-like carbon coated GLASTIX KOTE™

Technology developed utilizing Toyo Tanso's isotropic graphite manufacturing technology and silicon carbide (SiC) research results.

• ・Ensures excellent blister resistance and improves abrasion resistance and oxidation resistance
• ・Controls generation of particles from substrate