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HOME Products Surfece Treatment TaC-coated Graphite EVEREDKOTE™-B

TaC-coated Graphite EVEREDKOTE™-B

EVEREDKOTE™-B is a material created by coating the surface of a highly purified graphite substrate with a fine layer of TaC (tantalum carbide) by means of a proprietary Toyo Tanso Chemical Vapor Deposition (CVD) process.
Characteristics

EVEREDKOTE™-B Surface and SEM cross-section image

Features

  • ・Excellent heat resistance
  • ・Prevents the separation and scattering of graphite powder, as well as the release of gases andimpurities from the graphite substrate
  • ・Excellent resistance to reactions with etching gases

Application

  • ・Components for single crystal SiC growth
  • ・Components for MOCVD
  • ・High-temperature components

Properties/Test Data

General Physical Properties

Item Tantalum Carbide
Bulk Density 14.5Mg/m3
Melting Point 3985℃
Hardness 1550HK
Electrical Resistivity 0.15μΩ・m
Thermal Conductivity 9-22(W/m・K)
Coefficient of Thermal Expansion 7.1(106/K)
* The above numerical values are those taken from the below source and are not guaranteed values.
Source: H. Holleck: Material selection for hard coatings, J. Vac. Sci. Technol. A, Vol.4, No.6, Nov/Dec 1986

Reactivity with Various Substances

Reactive Substance 1200℃×5h 1600℃×5h
Hydrogen Chloride
Ammonia
Hydrogen
Oxygen × (600°C or more)
*◎:No reaction ×;Significant reaction

Hydrogen chloride reaction test: 20 Torr, HCl/H2 = 0.30/2.70 L/min (10%)
Ammonia reaction test: 20 Torr, NH3/H2 = 0.5/2.0 L/min (20%)
Hydrogen reaction test: 20 Torr, H2 3.0 L/min
Oxygen: Cracking and embrittlement of coating in low concentration oxidized atmosphere.

Reactivity with ammonium

Emissivity

Impurity analysis example mass ppm

Element Content
B < 0.01
N < 5
Na < 0.01
Mg < 0.05
Al < 0.01
Si  0.14
P <0.3
S <0.02
Cl -0.3wt%
Ca < 0.05
Ti < 0.005
V < 0.005
Cr < 0.1
Mn < 0.005
Fe  0.42
Co < 0.01
Ni 0.06
Cu <0.05
Zn < 0.05
As < 10
Nb 1.1
Mo 1.6

*1 < :Detection limit
*2 The figures above are measurement examples and are not to be guaranteed.