TaC/Ta Composite EVEREDKOTE™-K

High-purity tantalum with a tantalum carbide surface layer formed using a carburizing method

EVEREDKOTE™-K is a TaC/Ta composite. It consists of a high-purity tantalum matrix and a tantalum carbide surface layer formed using a carburization technology.

Characteristics

• The tantalum carbide layer has excellent thermal resistance and is stable at high temperatures.
• Excellent thermal shock resistance to withstand rapid heating and cooling.
• Low reactivity with etching gases.
• Excellent corrosion resistance under the presence of high-melting-point metals.
• Both the tantalum matrix and tantalum carbide layer have high purity.

EVEREDKOTE™-K Surface and Cross section



Reactivity with high-melting metals

	1600℃	1800℃	2000℃	2180℃
Ta VS Ta		++	++	++
Mo vs Mo	-	+	+	+
W vs W		+	+	+
Mo vs W			+	+
Ta vs TaC	+	++	++	++
Mo vs TaC	-	+	+	+
W vs TaC		-	-	+
TaC vs TaC	-	-	-	-

※ -:Negligible +:Weak ++ :Strong

Impurity analysis example mass ppm

Element	Content
B	0.03
Na	< 0.01
Mg	< 0.05
Al	0.35
Si	<0.01
P	<0.01
S	<0.01
Cl	0.03
Ca	< 0.05
Ti	0.01
V	0.02
Cr	< 0.1
Mn	< 0.005
Fe	0.06
Co	< 0.01
Ni	<0.01
Cu	<0.05
Zn	< 0.05
As	< 0.1
Nb	7

※1 < :Detection limit *2 The figures above are measurement examples and are not to be guaranteed.

Emissivity



Features

• Heat-resistant materials
• Corrosion-resistant materials
• Low emissivity
• Thermal shock resistance
• Dense material structure



Related link

• (Applications) Semiconductor manufacturing

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