Surface Treatment
SiC Coating PERMA-KOTE
A dense layer of silicon carbide (SiC) is created via chemical vapor deposition (CVD).
- ・Protects substrate from ambient environment
- ・Controls generation of particles and gas from substrate
- ・Allows modification, etc. of substrate surface
- ・Maximum dimensions:Φ1050X830H
| Article | Conditions for SiC Coating |
| Max size (mm) | Φ1050x830H |
| Thickness of SiC layer(μm) | 120±30 |
| Metal impurities content(mass ppm)※by GDMS method | B:0.15 / Na:0.02Al:0.01 / Cr: <0.1Fe:0.02 / <0.01 |
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Pyrolytic graphite coating PYROGRAPH
Pyrolytic carbon is coated via chemical vapor deposition (CVD).
- ・Improves gas impermeability
- ・Controls generation of particles and gas from substrate
- ・Improves chemical resistance
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Glass-like carbon coated GLASTIX KOTE
Glasslike carbon impregnates or covers the substrate.
- ・Improves gas impermeability
- ・Controls generation of particles from substrate
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SiC/C composites
Technology developed utilizing Toyo Tanso's isotropic graphite manufacturing technology and silicon carbide (SiC) research results.
- ・Ensures excellent blister resistance and improves abrasion resistance and oxidation resistance
- ・Controls generation of particles from substrate
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