Pyrolytic graphite coating PYROGRAPH™

PYROGRAPH™ is a product created by coating the surface of highly purified isotropic graphite with a fine layer of pyrolytic carbon by means of a proprietary Toyo Tanso Chemical Vapor Deposition (CVD) process.

Cross-section of PYROGRAPH™ under Polarization Microscope
Cross-section of PYROGRAPH™
under Polarization Microscope

Feature

Features

  • The pyrolytic carbon layer is extremely fine
  • Ultrapure
  • The layer coating ensures extremely low gas permeability
  • Excellent corrosion resistance against gas
  • Excellent oxidation resistance at low temperatures
  • Excellent heat resistance
  • Prevents the parting and scattering of graphite particles, and the emission of gas and impurities from the graphite substrate

Application

  • Single crystal silicon manufacturing equipment
  • Tube for atomic absorption spectroscopy
  • OLED manufacturing equipment

General Physical Properties

Item Unit Parallel to Coating Surface Perpendicular to Coating Surfaces
Bulk Density Mg/m3 2.2 2.2
Hardness HSD 100
Electrical Resistivity μΩ・m 2.00~4.00 2~5×103
Coefficient of Thermal Expansion 10-6/K 1.7 28
Tensile Strength MPa 98~147 Extremely weak
Young's Modulus GPa 29~39
Thermal Conductivity W/(m・K) 170~420 2~4

*The temperature range for the coefficient of thermal expansion is RT to 1000℃.
*The figures above are extracted from other publications, and are not to be guaranteed.

Impurity analysis example

Element Content
B < 0.01
Na 0.03
Al 0.02
Cr < 0.1
Fe < 0.01
Ni < 0.01

*Measurement method: Glow Discharge Mass Spectrometry
*The figures above are extracted from other publications, and are not to be guaranteed.