PYROGRAPH™ is a product created by coating the surface of highly purified isotropic graphite with a fine layer of pyrolytic carbon by means of a proprietary Toyo Tanso Chemical Vapor Deposition (CVD) process.
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Pyrolytic graphite coating PYROGRAPH™
under Polarization Microscope
Feature
Features
- The pyrolytic carbon layer is extremely fine
- Ultrapure
- The layer coating ensures extremely low gas permeability
- Excellent corrosion resistance against gas
- Excellent oxidation resistance at low temperatures
- Excellent heat resistance
- Prevents the parting and scattering of graphite particles, and the emission of gas and impurities from the graphite substrate
Application
- Single crystal silicon manufacturing equipment
- Tube for atomic absorption spectroscopy
- OLED manufacturing equipment
General Physical Properties
| Item | Unit | Parallel to Coating Surface | Perpendicular to Coating Surfaces |
|---|---|---|---|
| Bulk Density | Mg/m3 | 2.2 | 2.2 |
| Hardness | HSD | 100 | － |
| Electrical Resistivity | μΩ・m | 2.00～4.00 | 2～5×103 |
| Coefficient of Thermal Expansion | 10-6/K | 1.7 | 28 |
| Tensile Strength | MPa | 98～147 | Extremely weak |
| Young's Modulus | GPa | 29～39 | － |
| Thermal Conductivity | W/(m・K） | 170～420 | 2～4 |
＊The temperature range for the coefficient of thermal expansion is RT to 1000℃.
＊The figures above are extracted from other publications, and are not to be guaranteed.
Impurity analysis example
| Element | Content |
|---|---|
| B | < 0.01 |
| Na | 0.03 |
| Al | 0.02 |
| Cr | < 0.1 |
| Fe | < 0.01 |
| Ni | < 0.01 |
*Measurement method: Glow Discharge Mass Spectrometry
*The figures above are extracted from other publications, and are not to be guaranteed.
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